Product Description
Description
A new-type micro active piston prover (flow range: 0.04–1000 mL/min) with high accuracy, wide flow/pressure adjustment, efficient auto-control, and uniform temperature. Suitable for testing, calibration, quantity value transfer, and traceability of micro gas flowmeters under different pressures. Ideal for calibrating mass flowmeters, mass flow controllers, laminar flowmeters, sonic nozzles, micro flowmeters, and leak detectors—used in semiconductors, electronics, pharmaceuticals, aerospace, environmental protection, chemical engineering, and manufacturing.
Features
1. Wide flow/pressure range with stable output
2. Digital testing technology for high precision
3. Multi-layer sealing (leak-free, self-lubricating)
4. No measurement errors caused by temperature inconsistency
5. Balanced double-piston technology (pre-adjusts flow/pressure)
Parameters
| Item | Parameters | Item | Parameters |
| Uncertainty | ≤0.05%, ≤0.1% | Flow Stability | ≤0.1% |
Maximum Working Pressure | 1MPa abs | Pressure Testing | (0~1)MPa abs |
| Temperature Testing | (10~30)℃ | Humidity Testing | (0~100)%RH |
| Power Supply | 220V±20V AC 50Hz | Ambient Temperature | (20±2)℃ |
Specification
Model | Effective Volume | Flow Range | Uncertainty | Working Pressure |
HQD-0.01 | 10mL | (0.04~20)mL/min | ≤0.05%, ≤0.1% | (0~1)MPa abs |
HQD-0.02 | 20mL | (0.08~40)mL/min | ||
HQD-0.1 | 100mL | (0.4~200)mL/min | ||
HQD-0.2 | 200mL | (0.8~400)mL/min | ||
HQD-0.5 | 500mL | (2~1000)mL/min |
sqb-0.5-saamn
min
gas
measurement
flow
standard
range
pressure
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